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NANO PRO Compact Magnetron Ion Sputtering Coater for SEM Sample Preparation

SKU:
MA0600
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Email: Marknanossr@gmail.com
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NANO PRO Compact Magnetron Ion Sputtering Coater for SEM Sample Preparation

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Global Head Office

Email: Marknanossr@gmail.com

Tel：+86 15606950920

Wechat: 15606950920

Address:  Building 1, No. 39 Xinchang Road, Haicang District, Xiamen City, Fujian Province, China

Compact Magnetron Ion Sputtering Coater for SEM Sample Preparation

NANOSSR offers a compact magnetron sputtering coater that is ideal for lab SEM sample preparation. It is widely used to coat non-conductive SEM samples with Au for better imaging. It is also excellent for surface treatment and coating when using other sputtering targets. Low vacuum, less than 3Pa can be achieved quickly when using proper vacuum pumps. It generates much less heat and avoids plasma damage to the substrate sample. It is user friendly and easy to operate using touch panel control.

This mini coater is mainly used for sputtering Au, Pt, and Pd under air.

Vacuum pump is not included. You can order Vacuum pump with additional cost. 

Brand: NANO PRO™

Manufacturer: NANOSSR LLC

NANOSSR is a leading Sputtering Targets supplier and offers custom-made high purity sputtering targets. 

Technical Specifications

SKU# MA0600
Chamber Size ~Ø 120 *110 mm
Chamber Material Quartz Glass 
Compatible Target Size 

Ø 50 *0.1-1mm 

Ø 50 *1-2mm (Need to be used together with customized accessories)

 
Sputtering Source Power DC magnetron, Max. 20 W, Max. 60 mA, 0-800 V 
Target-to-Substrate Distance 50 mm
Sample stage size 2 inch diameter
Vacuum Limit
Operation Vacuum  5-10 Pa
Color Light blue/Navy Blue
Sputtering Time Programable
Operation Method  Control Touch Panel
Weight  about 18 kg
Dimension 250*360*306 mm
Supply Voltage 110V( 220v, other voltages are possible on request)
Total Electric Power
Cooling Method Air cooled
Warranty One year limited warranty with lifetime product support
Document

 # Use air as sputtering gas. All in one device- No need to connect Ar gas (no Ar gas inlet connection ) 

 

 

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