NANO PRO™ Semiconductor FPD Inspection Microscope
The NANO PRO™ Semiconductor FPD Inspection Microscope equipped with varisized wafer holders (including 6/8 inches), it is professionally applied for wafer and flat panel display detection. More comfortable, flexible and quicker operation is available with upgraded ergonomics design.
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Multi Optional Splitting Ratio: With broad beam image system, maximum field of view reaches to 26.5mm. Trinocular head with two optional splitting ratios of 100:0 or 0:100, 100% image outputs from eyepieces or camera. Trinocular head with three optional splitting ratios of 100:0 or 20:80 or 0:100, double-way image output of 20% from eyepieces and 80% from camera is achievable. The erect gemel trinocular head, same direction and same moving direction for objective and image, easy to view and operate.
- Stable Frame: All metal frame with the characteristics of low center, high rigidity and stability for professional industrial inspection, ensures to present a stable and clear image.
- High-Performance Nosepiece: High-performance nosepiece with precision bearing, is available for light and handy operation, precisionresetting, controllable concentricity.
- Large Travel Mechanical Stage: 8 inches three-layer mechanical stage, size: 525mm*330mm, moving range: 210mm*210mm, is professionally applied for industrial inspection of wafer, FPD, circuit package, PCB, materials, casting metal ceramic part, abrasive tools and so on, 6 inches stage for option, size: 445mm*240mm, moving range: 158mm×158mm.
Brand: NANO PRO™
Manufacturer: NANOSSR LLC
NANOSSR offers a variety of Microscopes. Please contact us for more information.
Technical Specifications：
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Item |
Specification |
BS-4050 |
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Optical System |
Infinity Color Corrected Optical System |
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Viewing Head |
30° inclined infinity trinocular head, erect image, interpupillary distance: 50-76mm, splitting ratio:100:0 or 0:100 |
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30° inclined infinity trinocular head, inverted image, interpupillary distance: 50-76mm, splitting ratio:100:0, 20:80 or 0:100 |
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5-35° adjustable, inverted image, tilting trinocular head, interpupillary distance: 50-76mm, splitting ratio:50:50, 100:0 or 0:100 |
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Eyepiece |
High eye point wide field plan eyepiece PL10X/25mm, with adjustable diopter |
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High eye point wide field plan eyepiece PL10X/25mm, with reticle and adjustable diopter |
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Objectives |
BD Semi-Apochromatic Metallurgical Objectives |
5X/NA=0.15, WD=13.5mm |
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10X/NA=0.3, WD=9mm |
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20X/NA=0.5, WD=2.5mm |
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50X/NA=0.8, WD=1mm |
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100X/NA=0.9, WD=1mm |
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Ultra-Long Working Distance BD Semi-Apochromatic Metallurgical Objectives |
20X/NA=0.4, WD=8.5mm |
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Infinity Long Working Distance BD Semi-Apochromatic Metallurgical Objectives |
50X/NA=0.55, WD=7.5mm |
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100X/NA=0.8, WD=2.1mm |
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100X/NA=0.8, WD=3.5mm |
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Bright Field Semi-Apochromatic Metallurgical Objectives |
5X/NA=0.15, WD=19.5mm |
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10X/NA=0.3, WD=10.9mm |
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20X/NA=0.5, WD=3.2mm |
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50X/NA=0.8, WD=1.2mm |
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100X/NA=0.9, WD=1mm |
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Nosepiece |
Sextuple BD nosepiece, with DIC slot |
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Quintuple BD nosepiece, with DIC slot |
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Sextuple bright field nosepiece, with DIC slot |
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Septuple bright field nosepiece, with DIC slot |
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Frame |
Reflected frame with low position coaxial focusing mechanism, coarse range: 33mm, fine precision: 0.001mm, with upper limit and tension adjustment. Built-in 100-240V wide voltage system, with brightness setting button and reset button. |
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Stage |
8 inches three-layer mechanical stage with low position coaxial adjustment, size: 525mm*330mm, moving range: 210mm*210mm, with clutch handle for quick movement. Glass plate for reflected use. |
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6 inches three-layer mechanical stage with low position coaxial adjustment, size: 445mm*240mm, moving range for reflected: 158mm*158mm, moving range for transmitted: 100*100mm, with clutch handle for quick movement. Glass plate for transmitted and reflected use. |
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Illumination |
Bright field/ dark field reflected illuminator, with variable aperture and field diaphragm, center adjustable; with switch device for bright field and dark field; with filter slot and polarizing slot. |
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Halogen light box, 12V/100W, with center set, for transmitted and reflected use |
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Halogen light, 12V/100W |
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Polarizer and Analyzer |
Polarizer and fixed analyzer |
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Polarizer and 360 degree rotatable analyzer |
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Rotating Workbench |
Rotating workbench. 8-inch wafer plate, for 6, 8 inches wafer |
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Interference Filter |
Blue interference filter for reflected use: |
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Green interference filter for reflected use: 520nm-570nm |
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Red interference filter for reflected use: 630nm-750nm |
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Interference filter for reflected use, color balance plate (white light), suitable for halogen lamps |
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DIC |
DIC kit |
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Adapter |
0.35X C-mount adapter, focus adjustable |
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0.5X C-mount adapter, focus adjustable |
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0.65X C-mount adapter, focus adjustable |
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1X C-mount adapter |
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Other Accessories Other |
High precision micrometer |
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Internal hexagonal Spanner M4 |
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Internal hexagonal Spanner M5 |
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Note: ● Standard Outfit, ○ Optional
