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NANO PRO Tantalum Sputtering Target Ta

SKU:
TA3813
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NANO PRO Tantalum Sputtering Target Ta

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Specifications Tantalum Sputtering Target

Material Tantalum
Purity (trace metals basis) 99.99% (4N) or 99.999% (5N)
Symbol Ta
Atomic Weight 180.94788
Atomic Number 73
Color/Appearance Gray Blue, Metallic
Thermal Conductivity 57 W/m.K
Melting Point (°C) 3,017
Coefficient of Thermal Expansion 6.5 x 10-6/K
Theoretical Density (g/cm3) 16.6
Z Ratio 0.262
Sputter DC
Max Power Density
(Watts/Square Inch)		 100
Type of Bond Indium, Elastomer
Comments Forms good films. Both standard and customized sizes are available.
Typical COA of Ta Sputtering Target

COA of 99.999% 3" x 0.25" Ta target

(SKU# TA3802) click here to open the COA


Product List of Tantalum Sputtering Target and Related Products
Metals
Name Purity

Tantalum Metal

Ta Metal

99.99% or 99.999%
Alloys
Name Composition

Aluminum Tantalum Alloy

AlTa Alloy

Al-Ta 13/87

Nickel Tantalum Alloy

NiTa Alloy

Ni-Ta 50/50
Compounds

Name

Formula

Tantalum Boride

TaB2

Tantalum Carbide

TaC

Tantalum Nitride

TaN

Tantalum Pentoxide

Ta2O5

Tantalum Selenide

TaSe2

Tantalum Silicide

TaSi2

Tantalum Silicide

Ta5Si3

Tantalum Suflfide

TaS2

Tantalum Telluride

TaTe2

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